Precision Sensors, Actuators and Systems WHO International Programme on Chemical Safety Some of its offspring have

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Precision Sensors, Actuators and Systems WHO International Programme on Chemical Safety Some of its offspring haveResearch into and development of high precision systems, microelectromechanical systems, distributed sensors actuators, smart structural systems, high precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors actuators and control